Finegrinding is a machining process with a multiple cutting tool out of bonded, extremely hard abrasives under permanent surface contact between workpiece and tool for improvement of size, form and surface quality. In the finegrinding process tools with bonded grain are used, in opposite to lapping where the grain is bonded. Due to this reason different removal mechanism take effect during machining, despite similar kinematic circumstances. Finegrinding is a double-side-cross-flatgrinding process with cycloid workpiece movement where both workpiece sides are machined simultaneously. After inserting the workpieces into the especially designed apertures of the carriers, the carriers are guided through a gear tooth system between two rotating grinding wheels. During this, the carriers move like the circulating wheels of an epicyclic gear between the driven inner and the resting outer pin ring of the epicyclic workholder drive system, so that the carriers in between the carriers move in cycloid tracks.

Thru-feed grinding is a single or double-disk-grinding process. Using the single-disk grinding process the parts are guided linearly on a conveyor belt directly under a rotating, slightly angled grinding wheel. Removal rates of several tenth of millimetres are possible in only one run. Using the double-disk grinding process the parts are guided in a round carrier or alternatively also linear on a conveyor belt between two rotating, slightly angled grinding wheels. Removal rates of several tenth of millimetres on both sides accurate to size are possible in only one run.

Honing is a double-side-cross-flathoning process with cycloid workpiece movement. After inserting the workpieces into the especially designed apertures of the carriers, the carriers are guided through a gear tooth system between two rotating honing wheels. The carriers move like the circulating wheels of an epicyclic gear between the driven inner and the resting outer pin ring of the epicyclic workholder drive system.

During the lapping process the workpieces are machined between two plan-parallel cast lapping-wheels. The kinematics can be described as a double-side planparallel process with cycloid workpiece movement. Through the upper lapping wheel the lapping grain in the form of a suspension reaches the working gap. Micro cracks appear due to the rolling movement of the grain, they lead through crack-linking to a break out of small particles. This removal leaks sideways out of the working gap. The removal results from the process parameters like wheel speed, normal force or the used grain size and grain amount. The lapped surface shows an inordinate “similar to crater”- like structure.

During the polishing process the workpieces are machined between two plan-parallel cast polishing-wheels. The kinematics can be described as a double-side planparallel process with cycloid workpiece movement. Through the upper polishing wheel the polishing media in the form of a suspension reaches the working gap. Micro cracks appear due to the rolling movement of the extremely small grain, they lead through crack-linking to a break out of small particles. This removal leaks together with the polishing media sideways out of the working gap. The removal results from the process parameters like wheel speed, normal force or the used polishing suspension. The polished surface shows an inordinate in general reflecting structure.

The Peter Wolters Deburring Systems are 2 up to 5-station-unit-systems each with 3 resp. 4 brushes per station. Deburring is possible on one side as well as on both sides. While deburring both sides the workpieces are turned over automatically with a flip-over-device. There’s also a full-automation available to connect the Deburring System to a Peter Wolters Finegrinding System. The brushes of the Burr-Ex Deburring Stations draw cycloid tracks on the parts which are machined. Through the immersion depth of the brush-bristles into the parts and their rotary lateral cross transverse movements relatively to the workpiece, all workpiece edges or bores have an extremely equal contact. Therefore we are able to reach also extremely equal deburring results in all flat directions.

Haze Free Polishing is a chemical mechanical polishing process to create perfect product surfaces of Prime-, Reclaim- and SOI-wafer amongst retention of the good results in geometry (GBIR, SFQR) achieved by the prior DSP process.