|
Solution
Finder |
|
To
reach our products & services fast:
|
|
|
|
|
|
|
|
Choose
Language |
|
|
|
Service |
|
|
|
Novellus
Systems, Inc. |
|
>Go to Novellus Corporate Website |
|
|
DSM 9B /
16B / 20B
|
|
The new DSM
Product line : Technical Facts
|
|

|
|
| Model
|
Lap
/
|
Main
|
Min.
|
Max.
|
|
| Polish
Plate
|
Motor
|
Part
|
Part
|
|
| Dia.
|
Rating
|
Thickness
|
Dia.
|
| 9B-5
|
L
24.8"
|
3.0
H.P.
|
0.008"
|
7"
|
|
| [630mm]
|
[2.2kW]
|
[0.20mm]
|
[178mm]
|
|
| P
25.2"
|
5.0
H.P.
|
|
|
|
| [640mm]
|
[3.7kW]
|
|
|
| 16B-5
|
L
44"
|
15
H.P.
|
0.016"
|
14"
|
|
| [1118mm
|
[11.2kW]
|
[0.40mm]
|
[356mm]
|
|
| P
45"
|
25
H.P.
|
|
|
|
| [1143mm]
|
[18.6kW]
|
|
|
| 20B-5
|
L
53.3"
|
15
H.P.
|
0.020"
|
17.5"
|
|
| [1354mm
|
[11.2kW]
|
[0.50mm]
|
[445mm]
|
|
| P
54.3"
|
30
H.P.
|
|
|
|
| [1380mm]
|
[22.4kW]
|
|
|
| (Technical
data is subject to modification)
|
|
|
|
|
|
|
| Model
|
| Carrier
|
Width
|
Depth
|
Height
|
|
| Carrier
|
Model
|
|
| |
|
| Dia.
|
Max.
|
|
| |
| 9B-5
|
9"
|
5
|
66"
|
44"
|
97"
|
|
| [229mm]
|
| [1676mm]
|
[1118mm]
|
[2464mm]
|
|
|
|
|
|
| |
|
|
|
|
|
| |
| 16B-5
|
16"
|
5
|
89"
|
61"
|
107"
|
|
| [406mm]
|
| [2261mm]
|
[1549mm]
|
[2718mm] |
|
|
|
|
|
| |
|
|
|
|
|
| |
| 20B-5
|
20"
|
5
|
97"
|
71"
|
116"
|
|
| [508mm]
|
| [2464mm]
|
[1803mm]
|
[2946mm]
|
|
|
|
|
|
| |
|
|
|
|
|
| |
| (Technical
data is subject to modification)
|
|
|
|
|
|