|
Solution
Finder |
|
To
reach our products & services fast:
|
|
|
|
|
|
|
|
Choose
Language |
|
 |
|
Service |
|
|
|
Novellus
Systems, Inc. |
|
>Go to Novellus Corporate Website |
|
|
AC 2000-P²
/ AC 1500-P³
|
|
The new AC2000-P²:
Technical Facts
|
|
|
|
|
| Machine
Type
|
AC
2000-P²
|
| Wheel-ø
[mm]
|
1935
|
| Ring
width [mm]
|
689
|
| Max.
load pressure [daN]
|
3500
|
| Upper
Wheel, Lower Wheel
|
|
| Drive
[kW] RPM [min-1]
|
46
40
|
| Inner
Workpiece drive
|
|
| Drive
[kW] RPM [min-1]
|
7.5
50
|
| Outer
Workpiece drive
|
|
| Drive
[kW] RPM [min-1]
|
7.5
12
|
| Dimensions
incl. switch cabinet (H x W x D) [mm]
|
2900
x 3900 x 4200
|
| Weight
[kg]
|
19000
|
| Load
Capacity
|
|
| 300
mm (12“) Wafer
|
15
pieces
|
| 200
mm (8“) Wafer
|
30
pieces
|
| Achieved
results on 300 mm wafers
|
|
| TTV
|
<
0.4 µm
|
| SFQR
|
<
0.03 µm
|
| Covered
Design Rule
|
<
90 nm
|
| (Technical
data is subject to modification)
|
|
|
|
|
|
|