Peter Wolters GmbH is developing, producing and marketing CMP systems for wafers up to 300 mm. The PM 300 Apollo is a turn-key solution from one supplier, including the necessary process know how. Its cluster design already integrates the wafer handling and, depending on the system configuration, cleaning units. The

PM 300 is one of the first CMP systems on the market dedicated to 300 mm wafer processing. Since 1998 it planarizes 300 mm production wafers with outstanding reliability. The experience of these installations is the basis for ongoing and further tool and process development. Its state-of-the-art concept enables the PM 300 to automatically optimize process performance. The system can be used for various applications, e.g. is installed at chipmakers for the planarization of structured wafers as well as at prime wafer manufacturers and wafer reclaiming companies.

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