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Novellus
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PM 200
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PM 200 GEMINI
Dry-in/Dry-out CMP-Cluster for 100 mm - 200 mm Wafers
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The
Peter Wolters GmbH is developing, producing and marketing CMP turn-key
system solutions for wafers up to 300 mm. The PM 200 GEMINI CMP system includes
CMP polishers, post-CMP cleaners and a computer controlled handling system for
automatic dry-in/dry-out processing of 100 - 200 mm wafer size.
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The cluster design provides a modular
system, that can be easily adapted to various applications like planarization
of patterned wafers with Oxide CMP as well as Metal-CMP, prime wafer polishing,
etc. Advanced solid design, excellent software control, process know-how and
various options are the strengths of the PM 200 GEMINI making it a unique tool
on the CMP market.
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