PM200 Gemini

PM 200 GEMINI
Dry-in/Dry-out CMP-Cluster for 100 mm - 200 mm Wafers

The Peter Wolters GmbH is developing, producing and marketing CMP turn-key system solutions for wafers up to 300 mm. The PM 200 GEMINI CMP system includes CMP polishers, post-CMP cleaners and a computer controlled handling system for automatic dry-in/dry-out processing of 100 - 200 mm wafer size.

The cluster design provides a modular system, that can be easily adapted to various applications like planarization of patterned wafers with Oxide CMP as well as Metal-CMP, prime wafer polishing, etc. Advanced solid design, excellent software control, process know-how and various options are the strengths of the PM 200 GEMINI making it a unique tool on the CMP market.

>> Technische Daten

   Download Broschüre PM 200

   Download Broschüre PM 200 MEMS